JPH0311890Y2 - - Google Patents
Info
- Publication number
- JPH0311890Y2 JPH0311890Y2 JP16973385U JP16973385U JPH0311890Y2 JP H0311890 Y2 JPH0311890 Y2 JP H0311890Y2 JP 16973385 U JP16973385 U JP 16973385U JP 16973385 U JP16973385 U JP 16973385U JP H0311890 Y2 JPH0311890 Y2 JP H0311890Y2
- Authority
- JP
- Japan
- Prior art keywords
- groove
- sample stage
- sample
- utility
- circumference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16973385U JPH0311890Y2 (en]) | 1985-11-06 | 1985-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16973385U JPH0311890Y2 (en]) | 1985-11-06 | 1985-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6278745U JPS6278745U (en]) | 1987-05-20 |
| JPH0311890Y2 true JPH0311890Y2 (en]) | 1991-03-20 |
Family
ID=31103811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16973385U Expired JPH0311890Y2 (en]) | 1985-11-06 | 1985-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311890Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4657193B2 (ja) * | 2006-11-08 | 2011-03-23 | 株式会社アロン社 | 吸着盤 |
-
1985
- 1985-11-06 JP JP16973385U patent/JPH0311890Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6278745U (en]) | 1987-05-20 |
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